Intellium Z型（Z30 Z40 Z100）
| 製品名 | Intellium Z30 |
|---|---|
| Light source | 635 nm ± 5 nm |
| Type | Fizeau Interferometer |
| Clear Aperture | φ30 mm |
| Sensitivity | λ/20 |
| Transmission Flat | λ/20 |
| Magnification | λ/20 |
| XY Stage | Stroke Range ± 1 mm |
| Z Stage | Stroke Range ± 1 mm |
| Dimension | 80 mm × 180 mm × 215 mm Approx. |
| Mass | 2.2 Kg Approx. |
| Power Requirements | AC100V-240V 50/60Hz 20W |
Intellum Z40
| 製品名 | Intellium Z40 | |
|---|---|---|
| Technology | Phase-shifting and/or IntelliPhaseTM | |
| System | Test Beam | 38 mm (1.5") |
| Zoom (×6) | Rotary dial (continuous) | |
| Focus | +/- 1.5 m | |
| Intensity | Rotary dial | |
| Alignment | Simple two spot alignment | |
| Alignment View | ± 1.8 degrees | |
| Part Viewing | Live video on computer screen | |
| Performance | Repeatability 3-flat 1 | λ/300 PV |
| RMS Repeatability 2 | λ/2000 | |
| Calibrated Accuracy | λ/100 | |
| Height Resolution | λ/8000 | |
| Spatial Resolution | 640 × 480 | |
| Fringe Resolution | 180 fringes | |
| Digitization | 8 bits | |
| Acquisition Time | 300 ms | |
| Averaging Modes | Intensity and Phase | |
| Laser Beam | Source | Helium-Neon, 632.8 nm, 1 mw |
| Polarization | Circular | |
| Coherence | >100 m | |
| Electrical | Power | 110/240 Volts, 50/60 Hz, 50 Watts |
| Mechanical | Dimensions | 140 mm × 165 mm × 254 mm 5.5" × 6.5" × 10.00" |
| Weight | 7.25 Kg （16 lb） | |
| Environmental Req. | Temperature | 15 to 30 °C (59 to 86°F) |
| Rate of Temp. change | <1.0°C per 15 min | |
| Humidity | Relative 5% to 95%, no condensing | |
| Vibration Isolation | Required for frequencies from 1 Hz to 120 Hz | |
| Computer | (optional) | |
Intellum Z100
| 製品名 | Intellium Z100 | ||||
|---|---|---|---|---|---|
| Technology | Phase-shifting and/or IntelliPhaseTM | ||||
| System | Test Beam | 102 mm (4") | |||
| Zoom (×6) | Rotary dial (continuous) | ||||
| Focus | +/- 2.0 m | ||||
| Intensity | Rotary dial | ||||
| Alignment | Simple two spot alignment | ||||
| Alignment View | ±1.8 degrees | ||||
| Part Viewing | Live video on computer screen | ||||
| Performance | Z100 |
HR |
NIR | ||
| 1053 - 1064 | 1300 | ||||
| Repeatability 3-flat 1 | λ/300 PV | ||||
| RMS Repeatability 2 | λ/2000 | ||||
| Calibrated Accuracy | λ/100 | ||||
| Height Resolution | λ/8000 | ||||
| Spatial Resolution | 640 × 480 | 2048 × 1536 | 1280 × 1024 | 640 × 480 | |
| Fringe Resolution | 180 fringes | 560 fringes | 300 fringes | 180 fringes | |
| Digitization | 8 bits | 10 bits | 10 bits | 8 bits | |
| Acquisition Time | 300 ms | 600 ms | 300 ms | 300 ms | |
| Averaging Modes | Intensity and Phase | ||||
| Laser Beam | Source | Helium-Neon 632.8 nm,2 mw | 1053 nm 50 nw | 1064 nm 50 mw | 1300 nm 50 mw |
| Polarization | Circular (Linear Optional) | ||||
| Coherence | >100 m | ||||
| Calibrated Accuracy | λ/100 | ||||
| Height Resolution | λ/8000 | ||||
| Electrical | Power | 110/240 Volts, 50/60 Hz, 50 Watts | |||
| Mechanical | Dimensions | 338 mm × 190 mm × 254 mm 13.5” × 7.5” × 10” |
|||
| Weight | 14 kg (39 lb) | ||||
| Environmental Req. | Temperature | 15 to 30 °C (59 to 86°F) | |||
| Rate of Temp. change | <1.0°C per 15 min | ||||
| Humidity | Relative 5% to 95%, no condensing | ||||
| Vibration Isolation | Required for frequencies from 1 Hz to 120 Hz | ||||
| Computer | (optional) | ||||